Silicon carbide microdisk resonator.
نویسندگان
چکیده
We demonstrate a silicon carbide (SiC) microdisk resonator with an intrinsic optical quality factor of 6.19×10(3), fabricated on the 3C-SiC-on-Si platform. We characterize the temperature dependence of the cavity resonance and obtain a thermo-optic coefficient of 2.92×10(-5)/K for 3C-SiC. Our simulations show that the device exhibits great potential for cavity optomechanical applications.
منابع مشابه
High Q silicon carbide microdisk resonator
Xiyuan Lu, Jonathan Y. Lee, Philip X.-L. Feng, and Qiang Lin Department of Physics and Astronomy, University of Rochester, Rochester, New York 14627, USA Department of Electrical and Computer Engineering, University of Rochester, Rochester, New York 14627, USA Department of Electrical Engineering and Computer Science, Case Western Reserve University, Cleveland, Ohio 44106, USA Institute of Opti...
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ورودعنوان ژورنال:
- Optics letters
دوره 38 8 شماره
صفحات -
تاریخ انتشار 2013